Characteristics of SiNx films on wet-etched Si for field emission device

Title
Characteristics of SiNx films on wet-etched Si for field emission device
Authors
정재훈주병권이윤희오명환장진
Keywords
field emission display; insulating film; electrical characteristics
Issue Date
1995-07
Publisher
'95 대한전기학회 하계학술대회 논문집
Citation
, 1137-1139
URI
http://pubs.kist.re.kr/handle/201004/7703
Appears in Collections:
KIST Publication > Conference Paper
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