X-ray photoelectron spectroscopy studies of modified surfaces of α-Al2O3, SiO2, and Si3N4 by low energy reactive ion beam irradiation

Title
X-ray photoelectron spectroscopy studies of modified surfaces of α-Al2O3, SiO2, and Si3N4 by low energy reactive ion beam irradiation
Authors
최원국고석근정형진
Keywords
X-ray photoelectron spectroscopy; Al2O3; SiO2; Si3N4; low energy reactive ion beam irradiation
Issue Date
1999-11
Publisher
Journal of vacuum science & technology. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society
Citation
VOL 17, NO 6, 3362-3367
URI
http://pubs.kist.re.kr/handle/201004/7753
ISSN
0734-2101
Appears in Collections:
KIST Publication > Article
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