Dependence of surface smoothing, sputtering and etching phenomena on cluster ion dosage
- Dependence of surface smoothing, sputtering and etching phenomena on cluster ion dosage
- 송재훈; 최덕균; 최원국
- gas cluster; cluster ion impact; surgace smoothing; sputtering; surface embossment; hillocks; surface migration
- Issue Date
- Nuclear Instruments and Methods in Physics Research B
- VOL 196, NO 3-4, 268-274
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- KIST Publication > Article
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