Dependence of surface smoothing, sputtering and etching phenomena on cluster ion dosage

Title
Dependence of surface smoothing, sputtering and etching phenomena on cluster ion dosage
Authors
송재훈최덕균최원국
Keywords
gas cluster; cluster ion impact; surgace smoothing; sputtering; surface embossment; hillocks; surface migration
Issue Date
2002-11
Publisher
Nuclear Instruments and Methods in Physics Research B
Citation
VOL 196, NO 3-4, 268-274
URI
http://pubs.kist.re.kr/handle/201004/7770
ISSN
0168-583X
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE