Analytical model for intrinsic residual stress effects and out-of-plane deflections in free-standing thick films

Title
Analytical model for intrinsic residual stress effects and out-of-plane deflections in free-standing thick films
Authors
정증현권동길백영준
Issue Date
2002-05
Publisher
Journal of Applied Physics
Citation
VOL 91, NO 10, 6333-6340
URI
http://pubs.kist.re.kr/handle/201004/7771
ISSN
0021-8979
Appears in Collections:
KIST Publication > Article
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