Relationship between field emission characteristics and hydrogen content in DLC deposited by layer-by-layer technique using PECVD.

Title
Relationship between field emission characteristics and hydrogen content in DLC deposited by layer-by-layer technique using PECVD.
Authors
오명환K. C. ParkJ. H. MoonS. J. ChungW. MilneJ. Jang
Keywords
field emission display
Issue Date
1996-07
Publisher
Technical digest of 9th international vacuum microelectronics conference, St. Petersburg, Russia.
Citation
, 268-272
URI
http://pubs.kist.re.kr/handle/201004/7781
Appears in Collections:
KIST Publication > Conference Paper
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