KIST Library Institutional Repository

플라즈마 포커스 장치를 사용한 물질 증착 방법 및 플라즈마 포커스-RF 스퍼터링 복합 장치

Author

이전국; 정규호; 이재갑

Assignee

한국과학기술연구원

Regitration Date

2008-03-04

Registration No.

10-0812358

Application Date

2007-02-12

Application No.

2007-0014546

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/78064

Appears in Collections:

KIST Patent > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML