AlN 열방출층 및 TiN 전극이 적용된 상변화 메모리

Author
김성일김용태김인수김춘근염민수김영환
Assignee
한국과학기술연구원
Regitration Date
2006-08-08
Registration No.
0612913
Application Date
2004-12-16
Application No.
2004-0107265
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/78137
Appears in Collections:
KIST Patent > Others
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