Influence of structural properties on RF and microwave characteristics of BaSrTiO ₃ films on various substrates.

Title
Influence of structural properties on RF and microwave characteristics of BaSrTiO ₃ films on various substrates.
Authors
S.F. KarmanenkoA.I. DekykN.N. Isakov오영제V.I. SakharovI.T. Serenkov
Keywords
RF reactive sputtering; Ion scattering; Structual strains; Cavity
Issue Date
2002-07
Publisher
Proceedings of the 14th International Symposium on Integrated Ferroelectrics
URI
http://pubs.kist.re.kr/handle/201004/7829
Appears in Collections:
KIST Publication > Conference Paper
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