Acoustic characterization of ALN films using a high overtone bulk acoustic wave resonator

Title
Acoustic characterization of ALN films using a high overtone bulk acoustic wave resonator
Authors
이시형김주형이전국G.D. MansfeldS.G. Alekseev윤기현
Keywords
HBAR; AlN; rocking curve; attenuation; sound velocity
Issue Date
2001-12
Publisher
Integrated ferroelectrics
Citation
VOL 41, 155-166
Abstract
Using the composite resonator with additional thck AlN film with the FWHM of rocking curve of 2.53" under investigation, the bulk acoustic wave attenuation constant and sound velocity along caxis were directly measured. The method of High Overtone Bulk acoustic wave Resonator (HBAR) spectroscopy based on frequency measurements of the positions of the resonator peculiarities of phase and amplitude of electromagnetic wave reflection coefficient from composite resonator structure was applied. The method provides attenuation and velocity measurement in a wide fiequency band, using the same sample. For the measurements, standard and moddied HBAR spectroscopy based on the analysis of only parallel resonance properties of composite resonator structures were used.
URI
http://pubs.kist.re.kr/handle/201004/7855
ISSN
1058-4587
Appears in Collections:
KIST Publication > Article
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