Low temperature growth of PZT(52/48) thin films using r.f. magnetron sputtering method

Title
Low temperature growth of PZT(52/48) thin films using r.f. magnetron sputtering method
Authors
김태송김동주이전국정형진
Keywords
non-volatile memory; PZT; sputtering process; Ferroelectric thin films
Issue Date
1996-01
Publisher
Ferroelectric thin films V, Mat. res. soc. symp. proc.
Citation
VOL 433, 243-247
URI
http://pubs.kist.re.kr/handle/201004/7856
Appears in Collections:
KIST Publication > Conference Paper
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