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dc.contributor.author김태송-
dc.contributor.author김동주-
dc.contributor.author이전국-
dc.contributor.author정형진-
dc.date.accessioned2015-12-02T02:57:18Z-
dc.date.available2015-12-02T02:57:18Z-
dc.date.issued199601-
dc.identifier.citationVOL 433, 243-247-
dc.identifier.other5737-
dc.identifier.urihttp://pubs.kist.re.kr/handle/201004/7856-
dc.publisherFerroelectric thin films V, Mat. res. soc. symp. proc.-
dc.subjectnon-volatile memory-
dc.subjectPZT-
dc.subjectsputtering process-
dc.subjectFerroelectric thin films-
dc.titleLow temperature growth of PZT(52/48) thin films using r.f. magnetron sputtering method-
dc.typeConference Paper-
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