Fabrication processes and characteristics of microelectromechanical system using PZT films

Title
Fabrication processes and characteristics of microelectromechanical system using PZT films
Authors
윤영수김준한T.H. LimU.A. BonneA.M. SchmidtD.L. Polla
Keywords
MEMS; PZT film; micromaching
Issue Date
1997-01
Publisher
Mat. Res. Soc. Symp. Proc.
Citation
VOL 444, 143-148
URI
http://pubs.kist.re.kr/handle/201004/7859
Appears in Collections:
KIST Publication > Conference Paper
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