KIST Library Institutional Repository

실리콘기판상에　성장된GaAs에피택셜층의　유기금속화학　증착법에　의한　델타－도핑형성　방법

Author

민석기; 김무성; 김용

Assignee

한국과학기술연구원

Regitration Date

1995-06-19

Registration No.

85920

Application Date

1991-07-08

Application No.

91-11523

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/78670

Appears in Collections:

KIST Patent > Others

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