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dc.contributor.author오명환-
dc.contributor.author강광남-
dc.contributor.author주병권-
dc.date.accessioned2024-01-12T05:34:05Z-
dc.date.available2024-01-12T05:34:05Z-
dc.date.issued1993-12-28-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/78671-
dc.title실리콘기판의　용융　접합방법　및　장치-
dc.typePatent-
dc.date.registration1993-12-28-
dc.date.application1992-11-17-
dc.identifier.patentRegistrationNumber5,273,205-
dc.identifier.patentApplicationNumber07/977,460-
dc.publisher.countryUS-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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