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중간　삽입층을　이용한　직접　접합　공정과　이를　이용하는　전계방출　소자의진공실장공정　및　실리사이드　제조공정

Author

주병권; 오명환; 박흥우

Assignee

한국과학기술연구원

Regitration Date

1999-09-15

Registration No.

234002

Application Date

1996-12-27

Application No.

96-73596

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/78777

Appears in Collections:

KIST Patent > Others

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