CBr4개스를 이용한 반도체 패턴 측면의 에피성장율 조절방법

Author
민석기김성일김무성
Assignee
한국과학기술연구원
Regitration Date
1998-11-21
Registration No.
178303
Application Date
1995-10-27
Application No.
95-37594
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/78788
Appears in Collections:
KIST Patent > Others
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