Effects of annealing temperature on microstructure and electrical and optical properties of radio-frequency-sputtered tin-doped indium oxid thin films.

Title
Effects of annealing temperature on microstructure and electrical and optical properties of radio-frequency-sputtered tin-doped indium oxid thin films.
Authors
나종갑Y. R. ChoY. H. KimT. D. LeeS. J. Park
Keywords
indium oxide; sputtering; electrical property; optical property
Issue Date
1989-01
Publisher
J. Am. ceram. soc.
Citation
v. 72, no. 4, 698-701
URI
http://pubs.kist.re.kr/handle/201004/7894
Appears in Collections:
KIST Publication > Article
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