MOCVD 기법으로 제작한 Al0.05Ga0.95As/GaAs/Al0.05Ga0.95As embedded 도파로의 전파손실 측정

Title
MOCVD 기법으로 제작한 Al0.05Ga0.95As/GaAs/Al0.05Ga0.95As embedded 도파로의 전파손실 측정
Authors
박경현변영태김용김선호최상삼
Keywords
MOCVD 기법; embedded 광도파로; 유효굴절률 방법; RIE(reactive ion etchin) 식각; cut-back 방법; 전파손실
Issue Date
1993-10
Publisher
한국물리학회 논문초록집
Citation
VOL 11, NO 2, 326-326
URI
http://pubs.kist.re.kr/handle/201004/7916
Appears in Collections:
KIST Publication > Conference Paper
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