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강자성체 박막의 마그네트론 스퍼터링 방법

Author

한승희; 서민; 신상범; 강운현; 전신영; 조민경

Assignee

한국과학기술연구원

Regitration Date

2022-08-04

Registration No.

10-2430700

Application Date

2021-04-20

Application No.

10-2021-0051119

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/79203

Appears in Collections:

KIST Patent > 2021

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