Formation and characterizations of ultra-shallow p+-n junctions using B10H14 ion implantation

Title
Formation and characterizations of ultra-shallow p+-n junctions using B10H14 ion implantation
Authors
G.Y. JeonJ.S. KimC.N. WhangS. Im송종한J.H. SongW.K. ChoiH.K. Kim
Keywords
implantation
Issue Date
2003-05
Publisher
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms
Citation
VOL B206, 409-412
URI
http://pubs.kist.re.kr/handle/201004/7942
ISSN
0168-583X
Appears in Collections:
KIST Publication > Article
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