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마이크로 볼로미터를 위한 바나듐 산화물 박막 제조 방법

Author

백승협; 길태현; 이기석; 최원준; 백정민; 김상현

Assignee

한국과학기술연구원

Regitration Date

2020-01-07

Registration No.

10-2065528

Application Date

2017-05-19

Application No.

10-2017-0062411

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/80029

Appears in Collections:

KIST Patent > 2017

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