KIST Library Institutional Repository

박막 증착 및 조성 탐색용 스퍼터링 장치

Author

최지원; 손영진; 정근; 윤석진; 최원국

Assignee

한국과학기술연구원

Regitration Date

2013-04-11

Registration No.

10-1255524

Application Date

2011-06-28

Application No.

2011-0062861

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/80735

Appears in Collections:

KIST Patent > 2011

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