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집속 이온빔(FIB)을 이용한 초탄성 금속 나노선의 SPM 프로브 제조

Author

안재평; 윤상원; 서종현

Assignee

한국과학기술연구원

Regitration Date

2012-10-22

Registration No.

10-1195202

Application Date

2011-04-21

Application No.

2011-0037226

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/80740

Appears in Collections:

KIST Patent > 2011

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