Synthesis and polymerizations of N-(tert-butoxy)maleimide and application of its polymers as a chemical amplification resist.

Title
Synthesis and polymerizations of N-(tert-butoxy)maleimide and application of its polymers as a chemical amplification resist.
Authors
안광덕구덕일
Keywords
N-(t-butoxy)maleimide; protected polymers; thermal deprotection; acidolytic deprotection deep UV photoresists; thermally stable resists; chemical amplification resists
Issue Date
1994-01
Publisher
Polymers for microelectronics : ACS symposium series
Citation
v. 537, 124-141
URI
http://pubs.kist.re.kr/handle/201004/8075
Appears in Collections:
KIST Publication > Article
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