Terpolymers of tosyloxymaleimide for application as a polymeric photoacid generator in single-component resists.

Title
Terpolymers of tosyloxymaleimide for application as a polymeric photoacid generator in single-component resists.
Authors
안광덕구덕일정찬문
Keywords
functional polymaleimides; tosyloxymaleimide; polymeric photoacid generator; single-component resists; chemical amplification resists; photoresists
Issue Date
1994-01
Publisher
Journal of photopolymer science and technology
Citation
v. 7, no. 3, 473-482
URI
http://pubs.kist.re.kr/handle/201004/8079
Appears in Collections:
KIST Publication > Article
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