The effect of buffer layer on the electrical properties of (BaSr)TiO//3 thin films deposited on indium tin oxide-coated glass substrate by using rf magnetron sputtering method.

Title
The effect of buffer layer on the electrical properties of (BaSr)TiO//3 thin films deposited on indium tin oxide-coated glass substrate by using rf magnetron sputtering method.
Authors
김태송김종희오명환
Keywords
BST thin film; sputtering process; ITO substrate; buffer layer
Issue Date
1994-01
Publisher
Journal of applied physics
Citation
v. 76, no. 7, 4316-4322
URI
http://pubs.kist.re.kr/handle/201004/8080
Appears in Collections:
KIST Publication > Article
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