Novel functional polymers from N-(tosyloxy)maleimide. Photochemical acid generation in solid-state and application as resist materials.

Title
Novel functional polymers from N-(tosyloxy)maleimide. Photochemical acid generation in solid-state and application as resist materials.
Authors
안광덕구덕일정찬문
Keywords
functional polymaleimides; tosyloxymaleimide; polymeric photoacid generator; single-component resists; chemical amplification resists; photoresists
Issue Date
1994-01
Publisher
Chem. mater.
Citation
v. 6, 1452-1456
URI
http://pubs.kist.re.kr/handle/201004/8095
Appears in Collections:
KIST Publication > Article
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