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dc.contributor.author이해원-
dc.contributor.author임건자-
dc.contributor.author김태은-
dc.contributor.author김주선-
dc.contributor.author이종호-
dc.date.accessioned2024-01-12T08:05:16Z-
dc.date.available2024-01-12T08:05:16Z-
dc.date.issued2006-06-27-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/81631-
dc.titleSTI-CMP용 고성능 슬러리-
dc.typePatent-
dc.date.registration2006-06-27-
dc.date.application2003-05-16-
dc.identifier.patentRegistrationNumber0596688-
dc.identifier.patentApplicationNumber2003-0031269-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2003
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