다층 경질 탄소박막과 그 제조방법

Author
이철승이광렬
Assignee
한국과학기술연구원
Regitration Date
2004-12-30
Registration No.
0465738
Application Date
2002-07-04
Application No.
2002-0038706
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/81666
Appears in Collections:
KIST Patent > 2002
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