A nucleation process and the characteristics of Cu metal films in ionized cluster beam deposition

Title
A nucleation process and the characteristics of Cu metal films in ionized cluster beam deposition
Authors
고석근이지연김철호정형진
Keywords
구리; 이온 클러스터 빔; 박막
Issue Date
1994-01
Publisher
새물리
Citation
VOL 34, NO 6, 713-720
URI
http://pubs.kist.re.kr/handle/201004/8173
ISSN
0374-4914
Appears in Collections:
KIST Publication > Article
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