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dc.contributor.author문성욱-
dc.contributor.author오명환-
dc.contributor.author심태석-
dc.date.accessioned2024-01-12T08:08:18Z-
dc.date.available2024-01-12T08:08:18Z-
dc.date.issued2003-09-01-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/81771-
dc.title가이드를 이용한 3차원 미소구조체의얼라인방법-
dc.typePatent-
dc.date.registration2003-09-01-
dc.date.application2000-09-07-
dc.identifier.patentRegistrationNumber397864-
dc.identifier.patentApplicationNumber00-53217-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2000
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