DSpace at KIST: Wafer-level transfer of thermo-piezoelectric Si3N4 cantilever array on a CMOS circuit for high density probe based data storage

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DSpace at KISTKIST Conference Paper 2006

Wafer-level transfer of thermo-piezoelectric Si3N4 cantilever array on a CMOS circuit for high density probe based data storage

Authors: CHO, IL JOO

Issue Date: 2006-01-15

Publisher: IEEE

Citation: IEEE International Conference on MEMS, pp.247 - 250

URI: https://pubs.kist.re.kr/handle/201004/81945

Appears in Collections:: KIST Conference Paper > 2006

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