Atomic transport in thermal spike induced ion mixing

Title
Atomic transport in thermal spike induced ion mixing
Authors
채근화송종한정순명장호재우정주정기섭황정남오영제정형진
Keywords
atomic transport; ion mixing; thermal spike; activation energy; impurity diffusion; RBS
Issue Date
1993-05
Publisher
Journal of applied physics
Citation
VOL 73, NO 9, 4292-4296
URI
http://pubs.kist.re.kr/handle/201004/8204
ISSN
0021-8979
Appears in Collections:
KIST Publication > Article
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