Interfacial oxide growing and filling-up behavior of the micro-gap in silicon fusion bonding processes

Title
Interfacial oxide growing and filling-up behavior of the micro-gap in silicon fusion bonding processes
Authors
주병권오명환K. H. Tchah
Keywords
micromachining; direct bonding; interfacial oxide
Issue Date
1993-02
Publisher
Journal of materials science
Citation
VOL 28, NO 5, 1168-1174
URI
http://pubs.kist.re.kr/handle/201004/8227
ISSN
0022-2461
Appears in Collections:
KIST Publication > Article
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