KIST Library Institutional Repository

박막용　스파터링　타켓

Author

나종갑

Assignee

한국과학기술연구원

Regitration Date

2002-03-04

Registration No.

328658

Application Date

2000-04-17

Application No.

00-19996

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/82334

Appears in Collections:

KIST Patent > 2000

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