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실리콘 웨이퍼 및 반도체 반응기용 알루미늄 합금 및 내식/내침식 PEO 코팅

Author

도정만; 윤진국; 최영준; 유병용; 한승희

Assignee

한국과학기술연구원

Regitration Date

2021-08-10

Registration No.

6927646

Application Date

2019-06-27

Application No.

2019-535243

Country

JA

URI

https://pubs.kist.re.kr/handle/201004/82956

Appears in Collections:

KIST Patent > 2019

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