Synthesis and polymerization of N-(tert-butoxy)maleimide and characteristic properties of its polymers for application as chemical amplification resists.

Title
Synthesis and polymerization of N-(tert-butoxy)maleimide and characteristic properties of its polymers for application as chemical amplification resists.
Authors
안광덕구덕일
Keywords
chemical amplification resists; thermally stable resist materials; high deprotection temperature; deprotection of polymers
Issue Date
1992-04
Publisher
Proceedings of polymeric materials-science and engineering (PMSE)
Citation
v. 66, 249-250
URI
http://pubs.kist.re.kr/handle/201004/8341
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE