원자력 현미경용 캔틸레버 센서 및 이의 제조방법

Author
김상경
Assignee
한국과학기술연구원
Regitration Date
2014-01-17
Registration No.
1355019
Application Date
2013-03-04
Application No.
2013-0022853
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/83493
Appears in Collections:
KIST Patent > 2013
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