Microscopy study for the batch fabrication of silicon diaphragm

Title
Microscopy study for the batch fabrication of silicon diaphragm
Authors
하병주주병권차균현오명환김철주
Keywords
MEMS; micromachining; silicon etching; diaphragm
Issue Date
1992-01
Publisher
전자공학회논문지
Citation
VOL 29A, NO 1, 33-40
URI
http://pubs.kist.re.kr/handle/201004/8375
Appears in Collections:
KIST Publication > Article
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