Dielectric properties and leakage current characteristics of Ta2O5 thin film prepared by sol-gel process

Title
Dielectric properties and leakage current characteristics of Ta2O5 thin film prepared by sol-gel process
Authors
오태성이창봉이병찬오영제김윤호
Keywords
sol-gel; Ta2O5 thin film; crystalline phase; dielectric properties; leakage current
Issue Date
1992-01
Publisher
Journal of the Korean ceramic society; 한국요업학회지
Citation
VOL 29, NO 1, 29-34
URI
http://pubs.kist.re.kr/handle/201004/8398
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE