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dc.contributor.author오태성-
dc.contributor.author이창봉-
dc.contributor.author이병찬-
dc.contributor.author오영제-
dc.contributor.author김윤호-
dc.date.accessioned2015-12-02T03:02:07Z-
dc.date.available2015-12-02T03:02:07Z-
dc.date.issued199201-
dc.identifier.citationVOL 29, NO 1, 29-34-
dc.identifier.other2695-
dc.identifier.urihttp://pubs.kist.re.kr/handle/201004/8398-
dc.publisherJournal of the Korean ceramic society-
dc.publisher한국요업학회지-
dc.subjectsol-gel-
dc.subjectTa2O5 thin film-
dc.subjectcrystalline phase-
dc.subjectdielectric properties-
dc.subjectleakage current-
dc.titleDielectric properties and leakage current characteristics of Ta2O5 thin film prepared by sol-gel process-
dc.typeArticle-
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