세라믹스 박막의 특성평가

Title
세라믹스 박막의 특성평가
Authors
장감용오영제
Keywords
박막구조; 기계적·열적 성질; 전기적 성질; 화학조성분석
Issue Date
1992-01
Publisher
요업재료의 과학과 기술
Citation
VOL 7, NO 3, 321-326
URI
http://pubs.kist.re.kr/handle/201004/8451
Appears in Collections:
KIST Publication > Article
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