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dc.contributor.author최원국-
dc.contributor.author김경국-
dc.contributor.author이지면-
dc.contributor.author박성주-
dc.date.accessioned2024-01-12T10:35:01Z-
dc.date.available2024-01-12T10:35:01Z-
dc.date.issued2003-03-12-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/84664-
dc.title아연산화물 반도체의 금속배선 형성 방법-
dc.typePatent-
dc.date.registration2003-03-12-
dc.date.application2000-08-17-
dc.identifier.patentRegistrationNumber377509-
dc.identifier.patentApplicationNumber00-47355-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2000
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