Process for the Measurement of Radio-Frequency Induced Plasma

Title
Process for the Measurement of Radio-Frequency Induced Plasma
Authors
이형직전명철윤상옥김대준
Keywords
plasma; high frequency; measurement
Issue Date
1992-01
Publisher
요업재료의 과학과 기술
Citation
, 178-188
URI
http://pubs.kist.re.kr/handle/201004/8476
Appears in Collections:
KIST Publication > Article
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