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dc.contributor.author김용태-
dc.contributor.author민석기-
dc.date.accessioned2024-01-12T11:00:27Z-
dc.date.available2024-01-12T11:00:27Z-
dc.date.issued1995-06-28-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/85031-
dc.title플라즈마　화학증착법을　이용한　갈륨비소　반도체소자의　쇼트키접합　및　금속배선용　텅스텐박막　형성방법-
dc.typePatent-
dc.date.registration1995-06-28-
dc.date.application1992-04-03-
dc.identifier.patentRegistrationNumber86154-
dc.identifier.patentApplicationNumber92-5596-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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