t-BOC maleimide copolymers for thermally stable deep UV resists by chemical amplification.

Title
t-BOC maleimide copolymers for thermally stable deep UV resists by chemical amplification.
Authors
안광덕구덕일김승주
Keywords
t-BOC; protected maleimide polymers; t-BOC-maleimide thermally stable resist materials; deep UV resist materials; chemical amplification resists; deprotection of polymers; N-[(t-BOC)-oxyphenyl] maleimide; reactive ion etch resistance
Issue Date
1991-01
Publisher
Journal of photopolymer science and technology
Citation
v. 4, no. 3, 433-443
URI
http://pubs.kist.re.kr/handle/201004/8545
Appears in Collections:
KIST Publication > Article
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