t-BOC maleimide copolymers for thermally stable deep UV resists by chemical amplification.
- t-BOC maleimide copolymers for thermally stable deep UV resists by chemical amplification.
- 안광덕; 구덕일; 김승주
- t-BOC; protected maleimide polymers; t-BOC-maleimide thermally stable resist materials; deep UV resist materials; chemical amplification resists; deprotection of polymers; N-[(t-BOC)-oxyphenyl] maleimide; reactive ion etch resistance
- Issue Date
- Journal of photopolymer science and technology
- v. 4, no. 3, 433-443
- Appears in Collections:
- KIST Publication > Article
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