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t-BOC maleimide copolymers for thermally stable deep UV resists by chemical amplification.

Title: t-BOC maleimide copolymers for thermally stable deep UV resists by chemical amplification.

Authors: 안광덕; 구덕일; 김승주

Keywords: t-BOC; protected maleimide polymers; t-BOC-maleimide thermally stable resist materials; deep UV resist materials; chemical amplification resists; deprotection of polymers; N-[(t-BOC)-oxyphenyl] maleimide; reactive ion etch resistance

Issue Date: 1991-01

Publisher: Journal of photopolymer science and technology

Citation: v. 4, no. 3, 433-443

URI: http://pubs.kist.re.kr/handle/201004/8545

Appears in Collections:: KIST Publication > Article

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