DSpace at KISTKIST Patent2020

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dc.contributor.author정호중-
dc.contributor.author황태연-
dc.contributor.author문성욱-
dc.contributor.author한상욱-
dc.contributor.author전승우-
dc.contributor.author조영욱-
dc.contributor.author임향택-
dc.contributor.author이승우-
dc.contributor.author이정현-
dc.contributor.author김용수-
dc.date.accessioned2024-01-12T11:30:48Z-
dc.date.available2024-01-12T11:30:48Z-
dc.date.issued2022-10-19-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/85604-
dc.title이온주입용 마스크 형성방법 및 이를 이용한 점결함 센터 형성 방법-
dc.typePatent-
dc.date.registration2022-10-19-
dc.date.application2020-09-24-
dc.identifier.patentRegistrationNumber10-2458001-
dc.identifier.patentApplicationNumber10-2020-0124081-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2020
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