다음극 직류전원 플라즈마 화학증착법을 이용한 단결정 다이아몬드의 성장

Author
이전국이재갑
Assignee
한국과학기술연구원
Regitration Date
2020-07-08
Registration No.
10-2133963
Application Date
2018-11-30
Application No.
10-2018-0152235
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/85749
Appears in Collections:
KIST Patent > 2018
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