게이트 산화막의 터널링에 대한 유효산화물두께 및 임계산화물두께 예측

Author
고은정최정혜
Assignee
한국과학기술연구원
Regitration Date
2019-12-02
Registration No.
10-2053331
Application Date
2018-06-19
Application No.
2018-0070133
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/85787
Appears in Collections:
KIST Patent > 2018
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