Plasma polymerization of hexamethyldisilazane.

Title
Plasma polymerization of hexamethyldisilazane.
Authors
김낙중박수영김은영홍성일Hiroyuki Sasabe
Keywords
plasma polymerization; plasma deposition; glow discharge; organosilicon
Issue Date
1990-01
Publisher
Polymer journal
Citation
v. 22, no. 3, 242-249
URI
http://pubs.kist.re.kr/handle/201004/8592
Appears in Collections:
KIST Publication > Article
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